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Major Publication List

  1. T.Hatsuzawa, K.Toyoda and Y.Tanimura: A metrological electron microscope system for microfeatures of very large integrated circuits, Rev. Sci.Instrum.Vol.61, No.3(1990)975/979.
  2. T.Hatsuzawa,T.Doi and K.Toyoda: Sub-ƒÊm Linewidth Standards and Their Measurements, Trans Soc. Instrum. Contr. Eng., Vol.28, Vol.1(1992)3/9. [in Japanese]
  3. T.Hatsuzawa and K.Toyoda: Critical dimension measurements by electron and optical beam for the establishment of linewidth standards, Proc. IEEE 1992, Int'l. Conference on Micro-electronic Test Structure, Vol.5, No.3(1992)180/182.
  4. T.HatsuzawaFA cylindrical envelope projection model for estimation of secondary electron intensity distribution at micro-steps, Meas. Sci. Technol. Vol.4(1993)842/845.
  5. T.Hatsuzawa, Y.Tanimura, K.Toyoda, M.Nara, S.Toyonaga, S.Hara, H.Iwasaki, and K.Kondou: A compact laser interferometer with a piezo-driven scanner for metrological measurements in regular SEMs, Rev. Sci. Instrum. Vol.65, No.8(1994)2510/2513.
  6. O.Nakamura, M.Goto, K.Toyoda, Y.Tanimura and T.Kurosawa: Development of a Coordinate Measuring System with Tracking Laser-interferometer, Ann.CIRP, Vol.40, No.1(1991)523/526.
  7. O.Nakamura and M.Goto: Laser interferometric calibration of microscan mechanisms by using three laser beams, Precision Engineering,Vol.15, No.1(1993)39/43.
  8. O.Nakamura and M.Goto: Four-beam laser interferometry for the three-dimensional microscopic coordinate measurement, Applied Optics, Vol.33, No.1(1994)31/36.
  9. O.Nakamura, M.Goto, K.Toyoda, N.Takai, T.Kurosawa and T.Nakamata: A laser tracking robot-performance calibration system using ball-seated bearing mechanisms and a spherically shaped cat's-eye retroreflector, Rev. Sci. Instrum., Vol.65, No.4(1994)1006/1011.
  10. T.Ishigami and K.Shiraishi: Absolute Calibration of Accelerometers Using a Laser Interferometer in a Low Frequency Range, J. Jpn. Soc. Prec. Eng., Vol.57, No.7(1993)1205/1210. [in Japanese]
  11. O.Nakamura and N.Sakano: A Method for Removing the Tip-Effect in Scanning Probe Microscopy, Trans Soc. Instrum. Contr. Eng., Vol.29, No.9(1993)1050/1053[in Japanese]
  12. T.Doi, K.Toyoda and Y.Tanimura: Measurements of Phase Change of Light on Reflection, Proceedings of SPIE, Vol.1729(1992)436/443.
  13. M.goto, Y.Tanimura, T.Kurosawa: Calibration of coordinate system using laser trackers, Proc. ISMTII'96
  14. T. Takatsuji, B.F. Oreb, D.I. Farrant and J.R.Tyrer: Simultaneous measurement of three orthgonal components of displacement by electronic speckle-pattern interferometry and the Fourier transform method, Appl. Opt. Vol.36, No.7, pp.1438-1445, 1997
  15. T. Takatsuji, A. Kirita and T. Kurosawa: A simple instrument for measuring edge angles using a light sectioning method, Measurment & Science Technology, Vol.8, No.7, pp.782-786, 1997
  16. T. Usuda and A. Umeda: An Elecrostatically driven torsional resonator with two degrees of freedom (Part 1) -The principle and characteristics of motion-, Int. J. Japan Soc.Pre.Eng., Vol.31, No.2, pp.135-140, 1997
  17. T. Doi, K. Toyoda and Y. Tanimura: Effects of phase changes on reflection and their wavelength dependence in optical profilometry, Appl. Opt. Vol.36, No.28, pp.7157-7161, 1997
  18. T. Takatsuji, M. Goto, T. Kurosawa, Y. Tanimura and Y. Koseki:The first measurement of three dimensional Coordinate using laser tracking inter- ferometer, Measurement & Science Technology, Vol.9, No.1, pp.,1998
  19. A. Onae, K. Okumura, Y. Miki, T.Kurosawa, E. Sakuma, J. Yoda and K. Nakagawa: Saturation Spectroscopy of Acetylene Molecule at 1550 nm Region using Erbium doped Fiber Amplifier, Opt. Communications, Vol.142, pp.41-44, 1997
  20. T.Takatsuji, K.Tanaka: Aprocedure for scaling sensory attributes based on multidimensional measurements; application to sensory sharpness of kichin knives, Measurement Sience & technology, vol.7 No.6, p869

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