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Last modified 1997/12/18
Japanese version is here
Scope of Activity
To establish standards and calibration for micro-scale, new coordinate measuring system, surface roughness and vibration, the dimensional and motional measurements have been carried out in the combination of probe techniques (electron, optical beam and stylus) with various type interferometers using laser sources traceable for length standard. Vibration standards have been maintained and disseminated.
Present Researches
Study on a standard of micro-scales
Coordinate measuring system by tracking laser interferometer
Vibration standards and its calibration technique
Measurement and evaluation of surface roughness
Optical measurement of surface form in the range of nanometers
Standards Dissemination
International Collaboration
Staff
Major Publication
Contact : Engineering Measurement Section
E-mail:
kikai@nrlm.go.jp
Tel:0XXX-XX-4041, Fax:0XXX-XX-4042